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Watermark free & remarkable particle control
 
Standard Wet Station - Easy to maintenance structure
High throughput - Higher throughput than competitor¡¯s
Minimized footprint - up to max. 30% smaller than other Wet Stations
Superior process performance - Watermark free & remarkable particle control
Maintenance-easy structure
User-friendly interface
 
 
 
Items
Description
Description
Wafer Size
  £ª150, 200, 300mm(6", 8",12") ~12"
Dimension
  £ª4600(W) x 1900(D) x 2000(H) ~   Various
Robot
  £ª3~4 robots by process   Servo Control
Chemical Supply
  £ªCCSS Supply  
Hot DIW
  £ªSeparated Hot DIW System   Temp - 25~85 / Volume - 36§¤/min
Control
  £ªPLC Control & Touch Screen, GUI